Deposition of pyrocarbon
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United States of America Patent
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Jun 25, 2002
Grant Date -
N/A
app pub date -
Nov 1, 1999
filing date -
Nov 1, 1999
priority date (Note) -
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Abstract
Pyrolytic carbon of extremely uniform crystalline characteristics and essentially free of discontinuities is obtained in a fluidized bed coater by creating an asymmetric recirculation of the fluidized bed within the high temperature coating chamber. Through the use of any of a variety of gas injection schemes, fluidizing/coating gas mixtures are injected through the three-dimensionally curved concave bottom surface of the coater to create a pattern where the fluidized bed ascends within about one-half of the volume of the coater and then spills over to become a descending bed in the other half.
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