Finishing element including discrete finishing members
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 2, 2002
Grant Date -
N/A
app pub date -
Apr 24, 2000
filing date -
Apr 26, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Unitary finishing elements having discrete finishing members fixedly attached to unitary resilient body are disclosed for finishing semiconductor wafers. The discrete finishing members can be comprised of a multiphase polymeric composition. The new unitary finishing elements have lower cost to manufacture and high precision. The unitary finishing elements can reduce unwanted surface defect creation on the semiconductor wafers during finishing.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully