Transfer mechanism for use in exchange of probe card
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 2, 2002
Grant Date -
N/A
app pub date -
Jul 7, 2000
filing date -
Jul 9, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A probe card transfer mechanism, in which a chuck top is used as a main transfer mechanism, comprises a passing and receiving mechanism for passing or receiving a probe card to or from the chuck top. The passing and receiving mechanism has an adapter for detachably holding the probe card having, for example, a card holder, a transfer tray for detachably holding the adapter, a pair of guide rails for guiding the transfer tray to a probe card passing and receiving position, an arm to which the guide rails are fixed, and a probe card supporting member for receiving the adapter conveyed together with the transfer tray along the arm. The probe card supporting member is provided around the chuck top. A distal end portion of the transfer tray is U-shaped. The transfer tray is mounted on the U-shaped portion.
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