Film forming apparatus and film forming method
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United States of America Patent
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Jul 9, 2002
Grant Date -
N/A
app pub date -
Jun 9, 1999
filing date -
Jun 19, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A film forming apparatus comprising a substrate holding section for holding a substrate to be processed, a nozzle unit arranged and opposing the substrate holding section, having a discharge hole for continuously applying film-forming solution, in the form of a slender stream, to a surface of a substrate held by the substrate holding section, and a drive mechanism for driving the substrate and the nozzle unit relative to each other, thereby to coat the surface of the substrate with the solution, while the nozzle unit is applying the solution, in the form of a slender stream, to the surface of the substrate.
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