Periodic scheduler for dual-arm robots in cluster tools with process-module residency constraints
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United States of America Patent
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Jul 9, 2002
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Jun 9, 2000
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Jun 9, 2000
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Abstract
A method for scheduling the allocation of resources in a semiconductor object processing tool. The method comprises identifying a conflict in a resource allocation schedule for the processing of a plurality of semiconductor objects through the tool over time. The schedule utilizes a fundamental period for scheduling the periodic introduction of the objects into the tool for processing. A conflict arising when a transport mechanism adapted to move the objects to and from the resources in the tool is scheduled to execute more than one transport action in a given time interval. The time blocks associated with the conflict are rescheduled from a present time interval to a different time interval such that the rescheduling of the time block does not violate a post-processing residency constraint for a residency time that the object spends in the resource whose time block is rescheduled.
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Patent Owner(s)
- BROOKS AUTOMATION, INC.
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Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Camporese, Daniel | New Westminster, CA | 1 | 14 |
Hamidzadeh, Babak | Vancouver, CA | 3 | 71 |
Rostami-Hesarsorkh, Shadi | Vancouver, CA | 17 | 419 |
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