Lot supply system and lot supply method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jul 9, 2002
Grant Date -
N/A
app pub date -
May 18, 2000
filing date -
May 20, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A lot supply system includes a plurality of processing units, a supply unit, a plurality of counters, and a supply controller. The processing units output a lot supply request and perform a predetermined process for a lot supplied to them. The supply unit supplies a lot stored in it to requesting processing units in response to the lot supply request from the processing units. The counters count product lots supplied to the requesting processing units at least in units of the requesting processing units. When counts of the counters reach preset values set in units of the requesting processing units, the supply controller supplies measurement lots stored in advance to the requesting processing unit and initializes counts of the counters. A lot supply method is also disclosed.
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