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Abstract

A pressure sensor operates on the principle of a differential pair of capacitors having a movable plate that is constituted by the deformable membrane of the sensor. It comprises a measurement circuit for measuring the capacitance of the capacitor, which circuit is incorporated in the housing of the sensor and is made up of first and second double-sided interconnected circuits which are situated on either side of the membrane and which are connected thereto in its peripheral region by connection means. The faces of the circuits which face the membrane serve to mount respective stationary plates of the capacitor, and the faces of the circuits which face away from the membrane comprise respective regions on which components that are sensitive to the displacement of the membrane towards one or other of the fixed plates are mounted, and a region that is insensitive to stray capacitance is also provided on one of the faces that face away from the membrane, for receiving the components forming the remainder of the measurement circuit.

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First Claim