Positive displacement type liquid-delivery apparatus

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United States of America Patent

PATENT NO 6419462
SERIAL NO

09627779

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A positive displacement liquid-delivery apparatus includes a positive displacement pump 110 and a differential pressure control unit 142. The positive displacement pump 110 includes a liquid-delivery chamber 128 having a watertight housing 122 with one part formed of a flexible diaphragm 124, and a diaphragm driver 136 linked to the diaphragm 124 for deforming the same to discharge fluid from the liquid-delivery chamber 128. The differential pressure control unit 142 uniformly controls the differential pressure inside and outside the diaphragm 124 during the pumping process.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 144-8510

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukunaga, Yukio Kanagawa-ken, JP 67 2700
Hongo, Akihisa Kanagawa-ken, JP 44 1211
Horie, Kuniaki Kanagawa-ken, JP 29 1570
Kamoda, Kenji Kanagawa-ken, JP 3 123
Tsukamoto, Kiwamu Kanagawa-ken, JP 26 1858
Uemura, Shinya Kanagawa-ken, JP 8 133
Yamagishi, Hirotake Kanagawa-ken, JP 1 114

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