Optical translation measurement
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United States of America Patent
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-
Jul 23, 2002
Grant Date -
N/A
app pub date -
Sep 7, 2000
filing date -
Mar 9, 1998
priority date (Note) -
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Abstract
A method for determining the relative motion of a surface with respect to a measurement device comprising: illuminating the surface with incident illumination; detecting illumination reflected from the surface to form at least one detected signal; and determining the amount of relative motion parallel to the surface from said at least one detected signal, characterized in that said determining includes correcting for the effects of relative motion perpendicular to the surface.
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