Microactuator, magnetic head device, and magnetic recording apparatus
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United States of America Patent
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Jul 23, 2002
Grant Date -
N/A
app pub date -
Jun 4, 1999
filing date -
Jun 16, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a microactuator, a fixed substrate and a movable substrate are placed to be spaced opposed to each other. Between these substrates, a plurality of actuators are arranged to provide different moving distances. The actuators include comb-like movable electrodes formed on the movable substrate, and fixed electrodes formed on the fixed substrate, and having a plurality of teeth that extend outside the leading ends of the teeth of the movable electrodes in an undriven state. The movable substrate is allowed to move so that the leading ends of the teeth of the movable electrodes reach the outer ends of the teeth of the fixed electrodes. The portions of the fixed electrode teeth, which extend outside the movable electrode teeth, are different in length among the actuators.
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