Method for fabricating micromachined members coupled for relative rotation
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United States of America Patent
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Jul 30, 2002
Issued Date -
N/A
app pub date -
Oct 28, 1999
filing date -
Oct 18, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for fabricating an integrated, micromachined structure, such as a torsional scanner, that includes a reference member, such as a frame, a pair of torsion hinges, and a dynamic member that is coupled to the reference member by the torsion hinges. The method includes providing a wafer that has been formed from silicon material, and that has both a frontside and a backside. A membrane is formed in the wafer by etching a cavity in the silicon material from the backside of the wafer. The method also includes establishing a pattern that defines the mirror surface and the torsion hinges on the frontside of the wafer at the membrane formed therein. The frontside of the wafer is processed to form therein the dynamic member and the torsion hinges that support the dynamic member for rotation about the axis.
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