Polishing composition and polishing method employing it

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United States of America Patent

PATENT NO 6428721
SERIAL NO

09564546

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Abstract

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A polishing composition comprising the following components: (a) an abrasive, (b) .alpha.-alanine, (c) hydrogen peroxide, and (d) water.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATEDKIYOSU-SHI AICHI 452-8502

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ina, Katsuyoshi Aichi, JP 17 529
Kitamura, Tadahiro Aichi, JP 12 272
Suzumura, Satoshi Aichi, JP 4 169

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