Importance

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Abstract

The present invention relates to a method for creating a microlithographic pattern on a workpiece, for increased resolution and image fidelity. The method comprises the steps of: providing a source for emitting electromagnetic radiation, illuminating by said radiation a spatial light modulator (SLM) having several pixels, projecting an image of the modulator on the workpiece, further coordinating the movement of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns, where an area of the pattern is exposed at least twice with a change in at least one, and preferably at least two, of the following parameters between the exposures: data driven to the SLM, focus, angular distribution of the illumination at the SLM, pupil filtering, polarisation.

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First Claim