Radiation detectors
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United States of America Patent
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-
Aug 6, 2002
Grant Date -
N/A
app pub date -
Mar 2, 1999
filing date -
Mar 4, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A thermal imaging device comprises an array of microbridges(10) disposed on a silicon readout circuit substrate (12). Each microbridge (10) is supported above the substrate (12) by electrodes (14 and 16) so that a cavity (26) is present between the microbridge (10) and the substrate (12). Each microbridge (10) has a collecting area, a region of which is occupied by a ferroelectric active element (20) which converts to received thermal radiation into an electrical response. Radiation which is received by regions of the collecting area not occupied by the active element (20) is converted into heat energy and then transmitted to the active element (20) by conduction.
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