Abbe error correction system and method
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United States of America Patent
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-
Aug 6, 2002
Grant Date -
Oct 18, 2001
app pub date -
Jan 5, 2001
filing date -
Jan 11, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention preferably employs non-contact, small-displacement, capacitive sensors to determine Abbe errors due to the pitch, yaw, or roll of a near linear mechanical stage that are not indicated by an on-axis position indicator, such as a linear scale encoder or laser interferometer. The system is calibrated against a precise reference standard so the corrections depend only on sensing small changes in the sensor readings and not on absolute accuracy of the sensor readings. Although the present invention is preferred for use in split-axis positioning systems with inertially separated stages, the invention can be employed in typical split-axis or stacked stage systems to reduce their manufacturing costs.
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