Cleaning apparatus
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United States of America Patent
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-
Aug 13, 2002
Grant Date -
Dec 6, 2001
app pub date -
Jul 10, 1998
filing date -
Jul 10, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A machine for cleaning containers has inside and outside arrays of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor. Used cleaning solution is diverted to a reclaim tank for reuse, thereby allowing low-cost cleaning with concentrated chemicals, and with the creation of less liquid waste requiring disposal. In a method for removing contaminants from flat media or silicon wafer containers or carriers, a mixture of surfactant and de-ionized water is sprayed onto containers on a spinning rotor. The used cleaning solution is collected, filtered and reused.
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