Dresser for polishing cloth and method for manufacturing such dresser and polishing apparatus
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United States of America Patent
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Aug 13, 2002
Grant Date -
N/A
app pub date -
Feb 5, 1998
filing date -
Feb 7, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A improved dresser for dressing a polishing surface, easily be manufactured such that an object to be polished is not scratched when the object is polished. The dresser can dress the polishing surface of a polishing apparatus to effect surface correction and to correct a time-lapse change due to a polishing operation, a number of spired projections are formed on a surface of a metallic substrate and a wear-resistant hard film is formed on at least a portion of the surface of the metallic substrate on which the projections are formed.
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