Apparatus and method for fabricating a microbattery
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United States of America Patent
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Aug 13, 2002
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N/A
app pub date -
Jun 29, 2000
filing date -
Jun 29, 2000
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Abstract
An apparatus and method for fabricating a microbattery that uses silicon as the structural component, packaging component, and semiconductor to reduce the weight, size, and cost of thin film battery technology is described. When combined with advanced semiconductor packaging techniques, such a silicon-based microbattery enables the fabrication of autonomous, highly functional, integrated microsystems having broad applicability.
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