Integrated edge gripper
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Aug 20, 2002
Issued Date -
N/A
app pub date -
Dec 14, 2000
filing date -
Dec 14, 2000
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A semiconductor processing robot is provided with a robot arm on which is mounted an integrated edge gripper having an orienting assembly and a detecting assembly. The orienting assembly operates to rotate a substrate such that a substrate reference marking, or indicium, is positioned at the detecting assembly. The detecting assembly detects the location of the reference indicium and thereby derives information about the relative orientation of the substrate in the integrated edge gripper.
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