Friction vacuum pump with a stator and a rotor
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United States of America Patent
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-
Aug 20, 2002
Grant Date -
N/A
app pub date -
Nov 8, 2000
filing date -
May 14, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
The invention relates to a friction vacuum pump (1) with a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) with one gas inlet (23, 28) each, as well as with junction for the pump stages, which are equipped with junction openings (36,37) and serve for the connection of the gas inlets (23, 28) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings (36, 37) are located in a plane which is disposed laterally adjacent to the pump stages (12, 13, 14) such that the distance between the junction openings (36, 37) and the rotor axis (15) is of minimum feasible size.
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