Liquid crystal on silicon (LCOS) display pixel with multiple storage capacitors
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United States of America Patent
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Aug 20, 2002
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app pub date -
Apr 23, 1999
filing date -
Apr 23, 1999
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Abstract
A liquid crystal on silicon (LCOS) display pixel with dual storage capacitors for increasing the storage capacitance of the charge storage node for the liquid crystal pixel. The two capacitors are in a stacked arrangement. The bottom capacitor is formed by using a buried diffusion layer as the bottom electrode, a first layer of polysilicon (poly) as the top electrode and silicon dioxide as the dielectric. The top capacitor is a poly-to-poly capacitor formed by using the first layer of poly as the bottom electrode and a second layer of poly as the top electrode.
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