Light modulator with two mirror sets
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United States of America Patent
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Aug 20, 2002
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N/A
app pub date -
Feb 20, 2002
filing date -
Feb 20, 2002
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Abstract
Manufacture a spatial light modulator by fabricating a first set of micro-mirrors, then subsequently fabricating a second set of micro-mirrors interspersed with the first set, to reduce space between adjacent micro-mirrors versus what could be done by simultaneously fabricating all the micro-mirrors as one set.
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