Multi-directional thermal actuator
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United States of America Patent
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Aug 27, 2002
Grant Date -
N/A
app pub date -
Apr 27, 2001
filing date -
Apr 27, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.
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