Coating solution applying method and apparatus
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United States of America Patent
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Aug 27, 2002
Grant Date -
N/A
app pub date -
Nov 29, 1999
filing date -
Nov 30, 1998
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An apparatus for applying a coating solution to a surface of a substrate to form a coating film of desired thickness thereon. The apparatus includes a rotary supporting device for supporting and spinning the substrate in horizontal posture, a solvent spraying device for spraying a solvent to the substrate, a coating solution supplying device for supplying the coating solution to the substrate, a storage device for storing a processing program stipulating varied points and periods of time, a timer acting as a reference for each point or period of time stored in the storage, and a controller operable to perform controls based on the points and periods of time and with reference to the timer.
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