Particulate free air bearing and seal
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 3, 2002
Grant Date -
N/A
app pub date -
Jul 24, 2000
filing date -
Jul 24, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A particulate free air bearing and seal is formed between a slide and an air bearing body. Pressurized gas is supplied to an air bearing region between the slide and the air bearing body. The pressurized gas causes the slide to float on the air bearing body thus avoiding particulate generation due to friction between the slide and the air bearing body. Vacuum is simultaneously supplied to a collector. The collector captures the pressurized gas and any particulates entrained within the pressurized gas preventing the particulates from entering and contaminating a clean area.
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