Dual fritted bubbler
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United States of America Patent
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-
Sep 3, 2002
Grant Date -
N/A
app pub date -
Dec 27, 1999
filing date -
Dec 27, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A dual chambered bubbler vessel for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems. The bubbler vessel is designed so that carrier gas enters through an inlet in the top thereof into an inlet chamber and after it has been saturated with the organometallic vapors exits through a first porous frit located in the floor of the inlet chamber into an outlet chamber and is withdrawn from the bubbler after passing through a second porous frit element located at the outlet of the bubbler.
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