Apparatus for depositing CdS and CdTe layers on substrates by means of a CSS process
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United States of America Patent
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Sep 3, 2002
Grant Date -
N/A
app pub date -
Mar 9, 2000
filing date -
Mar 29, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Apparatus for depositing substrates by means of a CSS process comprising a heated receptacle (20) for a supply (70) of material to be deposited and carrier means for holding the substrate (60) with its side to be deposited towards an opening (22) of said receptacle, said receptacle opening (22) being provided with a cover (30) including a plurality of through-holes (32) for the sublimated material, said cover separating said material supply (70) from said substrate (60) and, due to being heated to a temperature higher than that of said receptacle (20), acting as sublimation source for said substrate.
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