Micro-electromechanical structure resonator, method of making, and method of using
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 3, 2002
Grant Date -
N/A
app pub date -
Feb 18, 2000
filing date -
Feb 18, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to a hollow microbeam that is fabricated upon a base or pedestal. Processing of the hollow microbeam includes forming at least one hollow channel in the microbeam by removing temporary fillers after formation of the microbeam. The inventive microbeam may provide at least an order of magnitude increase in oscillational frequency over a solid microbeam.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully