Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
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United States of America Patent
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Sep 3, 2002
Grant Date -
N/A
app pub date -
Apr 17, 2000
filing date -
Apr 19, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.
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