Importance

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Abstract

Planarizing machines, alignment systems for planarizing machines, and methods for planarizing microelectronic substrates using mechanical and/or chemical-mechanical planarization. In one aspect of the invention, a planarizing machine for mechanical and/or chemical-mechanical planarization of a microelectronic substrate comprises a table, a planarizing pad, and a substrate carrier. The table can have a support panel and an opening through the support panel. The planarizing pad is on the support panel, and the pad has a window aligned with the opening. The substrate carrier assembly has a carrier head configured to hold a microelectronic substrate and drive system coupled to the carrier head. The carrier head and/or the table are movable relative to each other to rub the substrate against the planarizing pad. The planarizing machine also comprises an alignment assembly having a carriage assembly alignable with the opening and an actuator assembly coupled to the carriage assembly. The carriage assembly can have an emission site configured to be coupled to an optical monitoring system for directing a source light along a light path projecting from the carriage. Additionally, the actuator assembly is configured to move the carriage assembly relative to the window and the opening to align the light path with the window in the pad.

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First Claim