Electric heating element
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United States of America Patent
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-
Sep 10, 2002
Grant Date -
N/A
app pub date -
May 17, 1999
filing date -
May 5, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electric heating element formed on an insulating ceramic substance includes and electrically heat-generating material film having a microstructure composed of a silicide alone, a mixture of silicide and Si, or Si along fused to the surface of sintered nitride or carbide ceramic insulating substrate. A heating mechanism is coupled with the bottom face of an electrostatically chucking mechanism provided with a dielectric ceramic and electrodes formed on the bottom face of face of the heating mechanism. The heating mechanism has a fusable electric-heating material film between two ceramic insulting substrates having the same or nearly the same coefficients of thermal expansion. The films is fused to the substrates.
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