Bonded article having improved crystalline structure and work function uniformity and method for making the same
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United States of America Patent
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Sep 10, 2002
Grant Date -
N/A
app pub date -
Jun 22, 1999
filing date -
Jun 22, 1999
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Abstract
A bonded article including a single crystal cathode, for use in projection electron beam lithography, such as the SCALPEL.TM. system. Because of its single crystalline structure, the single crystal cathode has only slightly misoriented grains. As a result, the single crystal cathode has few structural non-uniformities, and therefore a uniform emission characteristic. The single crystal cathode may be made of at least one of tantalum, tungsten, rhenium, and molybdenum. A local bonding technique for bonding a single crystal cathode with a conventional member. The local bonding technique does not recrystallize a center of the single crystal cathode, and therefore produces a bonded article which is usable in a projection electron lithography system, such as the SCALPEL.TM. system. The local bonding technique may be laser welding and the single crystal cathode may be made of at least one of tantalum, tungsten, rhenium, and molybdenum. The member may be a conventional filament and the filament may be made of one of tungsten, a tungsten-rhenium alloy, and a tungsten-tantalum alloy.
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