Two-dimensional tunable filter array for a matrix of integrated fiber optic input-output light channels
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United States of America Patent
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Sep 10, 2002
Grant Date -
N/A
app pub date -
Mar 16, 2001
filing date -
Mar 16, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An integrated two-dimensional tunable filter array for a matrix of fiber-optic input-output light channels includes a tunable filter chip array sandwiched between a first semiconductive wafer in which the guiding grooves for the input light channels terminate in a 45.degree. reflecting surface causing a 90.degree. turn of the light beams into each tunable filter of the array. Then a third semiconductive substrate is bonded to the other side of the tunable filter array to receive the reflected light beams. A 45.degree. mirror on a {111} plane may be formed by slow etching of a {100} type wafer or the use of a {100} type wafer with a 9.7.degree. off axis cut.
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