Method and device for production of components for microfabrication
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United States of America Patent
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Sep 17, 2002
Issued Date -
N/A
app pub date -
Sep 29, 2000
filing date -
Nov 13, 1998
priority date (Note) -
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Abstract
Atomized particles within a desired size range (e.g., 1 micron to about 5 microns) are produced from two immiscible fluids, a first fluid source containing the formulation to be atomized, and a second fluid source which is contained in a pressure chamber surrounding at least the area where the first liquid is to be provided. The invention provides methods for: the production of templates for microfabrication, such as particles that serve as templates for self-assembly of monolayers; the creation of small particles to serve as building blocks for the microassembly of objects; and the use of an atomizate to etch configurations and/or patterns onto the surface of an object by removing a selected portion of the surface.
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