Method of detecting abnormalities in flow rate in pressure-type flow controller
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United States of America Patent
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Sep 17, 2002
Grant Date -
Jan 17, 2002
app pub date -
Apr 6, 2001
filing date -
Aug 10, 1999
priority date (Note) -
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Abstract
A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice--the pressure-type flow controller wherein with the upstream pressure P.sub.1 maintained about two or more times higher than the downstream pressure P.sub.2, the downstream flow rate Q.sub.C is calculated by the equation Q.sub.C =KP.sub.1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal Q.sub.Y between the calculated flow rate Q.sub.C and the set flow rate Q.sub.S.
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