Grounded centering ring for inhibiting polymer build-up on the diaphragm of a manometer
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United States of America Patent
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Sep 17, 2002
Grant Date -
N/A
app pub date -
Sep 20, 2000
filing date -
Sep 20, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A grid protects a manometer diaphragm from plasma. A plasma chamber is used to generate a plasma. A manometer is used to measure the pressure in the plasma chamber. A grounded electrically conductive grid is used to screen out ions in the plasma before they reach a diaphragm in the manometer. The grid may be formed in a centering ring. A pipe may be used to connect the manometer to the plasma chamber. The centering ring may be placed in the joint in the pipe, with the centering ring and grid being grounded to the pipe.
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