Method of manufacture of a thermal actuated ink jet printer
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United States of America Patent
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-
Sep 17, 2002
Grant Date -
N/A
app pub date -
Jul 10, 1998
filing date -
Jul 15, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method of manufacturing an ink jet printhead that includes etching a plurality of ink chambers in a semiconductor wafer that includes electrical circuitry. A first and second expansion layer and a conductive material layer between the first and second expansion layers are deposited on to the wafer and etched. The expansion layers are formed to be positioned over the ink chambers. Furthermore, the expansion layers are provided of a material that facilities displacement of the expansion layers upon heating thereof by the conductive material layer. The method includes the step of forming the expansive layers and conductive material layer into shutters for each ink chamber.
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