Capacitive microelectromechanical switches
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United States of America Patent
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-
Sep 17, 2002
Grant Date -
Mar 7, 2002
app pub date -
Jun 28, 2001
filing date -
Jun 28, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microelectromechanical switch is disclosed comprising a conductor, a dielectric layer disposed on the conductor, a metal cap disposed on the dielectric layer and a bridge disposed proximate to the metal cap such that an electrical potential applied between the bridge and conductor causes the bridge to deform and contact the metal cap.
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