Importance

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Abstract

An electrostatic inkjet head is constructed to operate such that a large margin is provided to a drive voltage and a deviation in the drive characteristic is significantly reduced. A vibration plate defines a part of an ink chamber connected to an inkjet nozzle. The vibration plate is elastically deformed so as to eject a droplet of ink from the inkjet nozzle. An individual electrode is located opposite to the vibration plate with a predetermined gap therebetween, the individual electrode being formed by processing a single crystal silicon substrate. Gap spacers are formed on the single crystal silicon substrate. The gap spacers are formed of insulating films so as to define a gap between the individual electrode and the vibration plate. The individual electrode is formed of a silicon film containing impurity atoms providing one of an n-type conductivity and a p-type conductivity to the individual electrode. The individual electrode is surrounded by the gap spacers.

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First Claim