Two-piece chuck

United States of America Patent

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Sep 24, 2002
Grant Date
Nov 1, 2001
app pub date
Jun 14, 1999
filing date
Jun 14, 1999

priority date (Note)
Expired

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Abstract

A two-piece chuck for supporting a substrate in which a base plate allows the wafer to tilt and also exposes the underside of the wafer during wash/rinse cycle as well as during load/unload operations.

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Patent Owner(s)

Patent Owner	Address
CUTEK RESEARCH INC	SAN JOSE CA

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Wytman, Joseph	San Jose, CA	3	70

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Two-piece chuck

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09332213

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PATENT NO	6454864
APP PUB NO	20010036742A1
SERIAL NO	09332213
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 24, 2002	US,6454864,B2 US6454864B2	GRANTED PATENT AS SECOND PUBLICATION
November 01, 2001	US,20010036742,A1 US20010036742A1	FIRST PUBLISHED PATENT APPLICATION

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09332213

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