Device for micromechanical switching of signals
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United States of America Patent
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Sep 24, 2002
Grant Date -
N/A
app pub date -
Jun 27, 2000
filing date -
Oct 29, 1997
priority date (Note) -
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Abstract
The invention refers to a micromechanical switching device including at least two contact elements (11, 12, 31, 32), which are provided at least partly movable relative each other and via thermal actuation can be closed and opened, whereby the contact elements (11, 12, 31, 32) at least partly are comprised of at least two materials (14, 15, 16, 17, 34-37) with essentially different thermal expansion coefficients. The contact elements (11, 12, 31, 32) at excitation are arranged to displace essentially in same level and in different directions.
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