Planar type optical scanning apparatus and mounting structure thereof
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United States of America Patent
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Sep 24, 2002
Grant Date -
N/A
app pub date -
Oct 13, 2000
filing date -
Feb 26, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a planar type optical scanning apparatus and a mounting structure thereof, which enables further miniaturization and cost reduction. By locating a mirror (14), on the surface side of a movable plate (12) that is axially supported by torsion bars (13A, 13B) on a silicon substrate (11), and a drive coil (15) on the rear side thereof, the area of the movable plate (12) can be reduced. Furthermore, in an optical scanning apparatus fixing region on a package substrate (31), a cavity (32) and conductive patterns (33, 33A, 33B) are provided, the construction being such that the electrode terminals (16A, 16B) of the drive coil provided on the rear face of the silicon substrate (11) of the optical scanning apparatus (10) are connected with the conductive patterns (33, 33A, 33B) to mount the optical scanning apparatus (10) on the package substrate (31).
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