Method of fabricating a micro-technical structure, and micro-technical component
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United States of America Patent
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Oct 1, 2002
Grant Date -
Apr 11, 2002
app pub date -
Oct 10, 2001
filing date -
Oct 10, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a method for fabricating in particular a TMR element for use in a MRAM, wherein a mask is arranged on a substrate and structured in such a manner that it shadows but does not cover a surface region of the substrate, and wherein material of the structure which is to be fabricated is then deposited on the substrate in a directed deposition process. The invention also relates to a component with a micro-technical structure which has been fabricated in this manner.
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