Using UV/VIS spectrophotometry to regulate developer solution during a development process
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United States of America Patent
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-
Oct 1, 2002
Grant Date -
N/A
app pub date -
Jul 23, 2001
filing date -
Jul 23, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system for regulating temperature of a developer is provided. The system includes a system for regulating in-situ developer temperature, comprising at least one lamp operative to heat a portion of a developer; a lamp driving system for driving the at least one lamp; a system for directing radiation to the portion of the developer; a measuring system comprising a UV/Vis spectrophotometry system for measuring parameters of the developer based on radiation reflected from the developer; and a processor operatively coupled to the measuring system and a lamp driving system, the processor receiving developer parameter data from the measuring system and the processor using the data to at least partially base control of the at least one lamp so as to regulate temperature of at least a portion of the developer
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