Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators
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United States of America Patent
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Oct 1, 2002
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N/A
app pub date -
Oct 26, 2000
filing date -
Jun 5, 1998
priority date (Note) -
Expired
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Abstract
The use of robust substrates on the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of conventional machining techniques to create a new class of micro-machined structures. A particular robust substrate-based micro-machine structure is a capacitive pressure sensor that includes a pressure sensitive diaphragm and an electrode.
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