Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position
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United States of America Patent
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Oct 1, 2002
Issued Date -
N/A
app pub date -
Oct 5, 2001
filing date -
May 18, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Transferring apparatus includes a main body defining a take-up position at which a rectangular glass substrate is located and a transfer position spaced apart from the take-up position. A transferring mechanism is arranged between the take-up and transfer positions and provided with a hand for supporting the substrate and transferring the substrate from the take-up position to the transfer position. Two optical sensors are provided on the hand and detect one side of the substrate located at the take-up position. A control section of the apparatus generates positional data in accordance with the detection signals from the sensors. The positional data includes an angle of the one side of the substrate to the hand and a distance between the one side and the hand. The control section controls the operation of the transferring mechanism based on the positional data so as to transfer the substrate from the take-up position and the transfer position and to position it to the transfer position.
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