Electrostatic chuck having improved electrical connector and method
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United States of America Patent
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Oct 8, 2002
Grant Date -
N/A
app pub date -
May 7, 1999
filing date -
May 7, 1999
priority date (Note) -
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Abstract
An electrostatic chuck 55 comprises an electrical connector 140 which is connected to the electrode 105 to conduct an electrical charge to the electrode 105. The electrical connector 140 comprises a refractory metal having a melting temperature of at least about 1500.degree. C., such as for example, tungsten, titanium, nickel, tantalum, molybdenum, or alloys thereof. Preferably, the electrical connector 140 is bonded to the electrode 105 by a metal having a softening temperature of less than about 600.degree. C., such as aluminum, indium, or low melting point alloys.
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