Substrate support member
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 15, 2002
Issued Date -
N/A
app pub date -
Mar 17, 2000
filing date -
Jul 11, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention generally provides a support member adapted to provide vacuum chucking. In one aspect, a support member having an upper surface having an outer, raised portion defining an inner, recessed portion is provided. The inner recessed portion is in fluid communication with a vacuum supply. The support member may include a plurality of raised support portions having one or more recessed portions adjacent thereto, the raised support portions having equal heights above the recessed portions. The transition between the raised portions and the recessed portions is gradual and the orifices formed by the holes extending through the upper surface of the substrate support are rounded to eliminate sharp edges and rapid changes in height at the upper surface.
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International Classification(s)
Cited Art Landscape
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