Importance

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Abstract

A method and apparatus for protecting hypersensitive microcircuits on the face of a semiconductor wafer from contamination and mechanical damage during die sawing and subsequent die handling operations include the provision of a plastic sheet having an array of protective domes formed into it, the array corresponding to the array of microcircuits on the wafer, and the temporary adhesion of the sheet to the face of the wafer such that each die in the wafer is covered by a respective one of the domes, with an associated one of the microcircuits protectively sealed therein. Die sawing is performed with the component side of the wafer facing up, the cut passing between the domes and through the thicknesses of both the domed sheet and the wafer such that each die is separated from the wafer, with a corresponding one other domes still attached to it. The domes may be removed later when the dies are located in a more benign environment by simply peeling them off the die. The invention enables the use of conventional die-handling equipment and results in improved device yield.

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First Claim