Method of operating micromachined members coupled for relative rotation
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United States of America Patent
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Oct 22, 2002
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N/A
app pub date -
Mar 3, 2000
filing date -
Oct 18, 1993
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Abstract
A method for operating a monolithic, integrated, micromachined structure that includes a reference member and one or more dynamic members. Each dynamic member is supported from the reference member, either directly or indirectly, by torsion hinges. Supported in this way, each dynamic member exhibits a plurality of vibrational modes. Preferably, the structure is micromachined to establishes specified relationships between various pairs of vibrational modes. The method also includes applying force to each dynamic member that urges the member to rotate out of a rest position to a fixed particular angle.
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